MEMSII Lecture 3 Dry etching II - MEMS
EEL6935 Advanced MEMS 2005 H. Xie 1 Lecture 3 Dry Etching II Agenda: ÊH 2 and O 2 in dry etching ÊAluminum dry etch ÊSiO2 dry etch ÊDeep oxide etch 1/12/2005 EEL6935 Advanced MEMS (Spring 2005) Instructor: Dr. Huikai Xie EEL6935 Advanced ......