Dry Etching and RIE - Department of Computer Science & Engineering
Dry Etching and Reactive Ion Etching (RIE) MEMS 5611 Feb 19 th 2013 Shengkui Gao 1 Contents refer slides from UC Berkeley, Georgia Tech., KU, etc. (see reference) ... Etching or Lift-off? • Two principal means of removing material. • Etching: top to botto...